Costas J. Spanos

Department of Electrical Engineering and Computer Sciences
University of California at Berkeley
510 Cory Hall #1770
tel 510 643-6776
fax 510 642-2739
Berkeley CA 94720-1770


Resume and publication list.

Administrative assistant for research:
Charlotte Jones: 510-643-2834, FAX 510-642-2739
Research Support Officer for SRC and NSF projects:
Gary Given: 643-9783

The easiest way to reach me is by email at

My research activities include computer-aided manufacturing for integrated circuits, equipment modeling and control, process metrology, computer-aided design for manufacturability and flexible manufacturing systems. Our past and current activities have created the Berkeley Computer-Aided Manufacturing (BCAM) project. I am also the co-Principal Investigator of the Feature Level Compensation and Control Project. My engineering diploma is from the National Technical University of Athens, Greece and my Masters and Ph.D. are from Carnegie Mellon University.