Biographical Sketch of Costas J. Spanos



COSTAS J. SPANOS (S’77-M’85-SM’95-Fellow’00) was born in 1957 in 
Piraeus, Greece. He received the Electrical Engineering Diploma with honors from 
the National Technical University of Athens, Greece in 1980 and the M.S. and Ph.D. 
degrees in Electrical and Computer Engineering from Carnegie Mellon University in 
1981 and 1985 respectively, working on the development of Statistical Technology 
CAD systems. From June 1985 to July 1988 he was with the advanced CAD develop-
ment group of Digital Equipment Corporation in Hudson MA, where he worked on 
the statistical characterization, simulation and diagnosis of VLSI processes. In 1988 
he joined the faculty at the department of Electrical Engineering and Computer Sci-
ences of the University of California at Berkeley, where he is now a Professor, and 
the Director of the Berkeley Microfabrication Laboratory. He has served in the tech-
nical committees of the IEEE Symposium on VLSI Technology, the International 
Semiconductor Manufacturing Sciences Symposium, the Advanced Semiconductor 
Manufacturing Symposium and the International Workshop on Statistical Metrology. 
Dr. Spanos was the editor of the IEEE Transactions on Semiconductor Manufactur-
ing from 1991 to 1994. Dr. Spanos has published more than 100 referred publications 
and has received best paper awards in 1992, and again in 1997. His research interests 
include the development of flexible manufacturing systems, the application of statis-
tical analysis in the design and fabrication of integrated circuits, and the development 
and deployment of novel sensors and computer-aided techniques in semiconductor 
manufacturing.